Surface sensitive detection systems

Gas flow detectors for surface characterization

Surface sensitive detectors

  • Gas flow detector with multi-wire anode
  • All gas connections are made with Swagelok 3mm
  • Surface analyzes (thin surface layers)
  • Emission spectra registration
  • Possible to combine with transmission system for simultaneous analyzes (if the sample is suitable for transmission analyzes)
  • Suitable for thick samples (up to 1cm thickness)
  • Requires the connection to special gas mixture (see bellow)

Conversion electrons

  • Required gas mixture of 10% of CH4 in He, cylinder output pressure controllable in a range from 0 to 3 bar
  • Depth senitivity is about 100 nm (depends on sample)
  • Sample has to be conductive and connected to the sample holder in a conductive way
  • Best sensitivity

X-rays

  • Required gas mixture of 10% of CH4 in Ar, cylinder output pressure controllable in a range from 0 to 3 bar
  • Depth senitivity is about 10 um (depends on sample)

Complete system illustration

  • The system is connected to the cylinder via gas tubing made with 3 mm swagelok connections
  • Gas tubing includes flow rate control valve and bubble indicator

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